Course: microtechnology structuring lab

Course no. :n/a
ECTS credits:2
Lecturer(s):Prof. Dr. H. Lenz-Strauch
Available: winter term summer term
Course type:Practical exercises
Exam type:Experimental study
Exam requirements:Successful participation in all experiments of the lab (preparation, performing the experiments, analysis and documentation of the results)
Objectives:The students apply the methods of the lecture by building a simple MEMS. They are able to prepare the fabrication processes, perform them with guidance and to analyse and document the results.
Course contents:Fabrication of a simple MEMES according the course contents.
Literature:W. Menz, W. Mohr, O. Paul: Mikrosystemtechnik für Ingenieure, Wiley - VCH 2005
W. Ehrfeld: Handbuch Mikrotechnik, Hanser 2002
P. Rai-Choudhury : Handbook of Microlithography, Micromachining and Microfabrication, SPIE Optical Engineering Press 1997
S. Büttgenbach: Mikrosystemtechnik, Teubner 1994
available in modul:technical compulsory elective bachelor in semester 6