Course: microtechnology thin-film technology lab

Course no. :n/a
ECTS credits:2
Lecturer(s):Prof. Dr.-Ing. S. Gaßmann, Prof. Dr. H. Lenz-Strauch
Available: winter term summer term
Course type:Practical exercises
Exam type:Experimental study
Exam requirements:Successful participation in all experiments of the lab (preparation, performing the experiments, analysis and documentation of the results)
Objectives:The students apply the methods of the lecture by deposition of layers for MEMS-technologies. They are able to operate the machines with guidance and to analyse and document the operating conditions.
Course contents:Operation of the basic machines for micro system fabrication according the course contents.
Literature:S. Büttgenbach: Mikrosystemtechnik, Teubner, 1994
W. Menz, W. Mohr, O. Paul: Mikrosystemtechnik für Ingenieure, Wiley - VCH 2005
M. Wutz, H. Adam, W. Walcher: Handbuch Vakuumtechnik; Vieweg 2004
H. Frey, G. Kienel: Dünnschichttechnologie; VDI Verlag 1993
available in modul:technical compulsory elective bachelor in semester 6